ViennaPS-3.1.0

What's Changed

• Update Core, enable automatic publishing of Python packages
• Add 2-particle TEOS PE-CVD model
• Enable material-specific rates in SingleParticleProcess
• Add Bosch process example and SF6 etching model

Full Changelog: v3.0.1...v3.1.0

ViennaPS-3.0.0

What's Changed

• Added the ViennaCore library for common functionalities
• Changed the fixed class and function prefix 'ps' to a namespace 'viennaps'.
• Extracted the cell set functionalities to a separate library ViennaCS
• Some cell set examples were moved to ViennaCS
• Updated the ALP example

ViennaPS-2.0.0

What's Changed

• Major CMake overhaul
• Add single-pass flux calculation
• Add fin tapering option
• Process model improvements

Full Changelog: 1.3.1...2.0.0

ViennaPS-1.3.1

New in this release:

• Oxide regrowth model now also works in 3D
• Added new constructors to psProcess to quickly run simple models
• Fixed the deep copy function for a psDomain.
• Tilting of the source direction when using ray tracing is now possible! (an example will follow soon)
• Added small unit tests to assert the correct functionality of the library
• Added a generalized anisotropic process model to enable the modeling of selective epitaxial growth. A SEG example has been added.
• New helper functions in psDomain to save volume and level set meshes: saveVolumeMesh(), saveLevelSetMesh().

Breaking Changes:

• Changed psProcess member function to enable flux smoothing. Removed function setFluxSmoothing(bool) and added the functions: enableFluxSmoothing() and disableFluxSmoothing(). Flux smoothing is enabled by default.
• The name conventions of the folder and example have changed to all begin with a lowercase letter. Also, all models now also contain the prefix 'ps'
• The WetEtching model has been removed. Instead, a generalized anisotropic process model has been added. The example has been updated accordingly.
• The psDomain member function printSurface() has been renamed to saveSurfaceMesh().

Note: This release uses a legacy branch of ViennaLS. This is a temporary measure, while we rework and enhance the entire build system of ViennaLS and ViennaPS. The new and improved build system will be released with a new version of the library.

ViennaPS-1.3.0

New in this release:

• Implemented Python bindings for most tools in ViennaPS and all predefined models. This allows users to run all predefined models on custom geometries in Python scripts. Implementing custom models in Python is not yet supported.
• Implemented a material map to assign custom material IDs to each level set in the geometry.
• Implemented a logging class. Users can now specify different log levels.
• Added a tool to extrude a 2D geometry to a 3D geometry.

Model updates:

• Added a TEOS single and multi-particle deposition model.
• Added a simple isotropic model.
• Updated the SF6O2 and Fluorocarbon etching model.
• Updated the redeposition model.

Small fixes:

• Small fixes in the ViennaPS application.
• Automate point order detection in GDS file reader.

ViennaPS-1.2.0

• Introduced box distribution for geometric models
• Replaced volume model by an advection callback class
• Added option to disable the translation field
• Added option to change the point order when reading GDS files
• Compact tools now use dynamic data size instead of static one
• Added a wet etching model and example
• Added a redeposition model and example

Attention:
The function signature of calculateVelocities(..) in the interface class psSurfaceModel has changed.

ViennaPS-1.1.0

• Introduced new Geometric model, which allows users to build processes based on geometric modelling.
• Merged tools for compact model development, including CSV file I/O, interpolation tools (rectilinear grid and nearest neighbors).
• Added a GDSII file parser to create geometries from GDS masks.
• Removed old HRLE based cell set.
• Added configuration parsing in the examples.
• Added an application which can run user configuration files to quickly build geometries and run a set of pre-defined processes.

ViennaPS-1.0.0

First release of ViennaPS.

Key features:

• Combining process simulation and emulation.
• Level set surface description provided by ViennaLS.
• Top-down Monte Carlo flux calculation provided by ViennaRay.
• Additional to the level set surface description, a cell set volume description can be used.
• Basic process models and geometries are implemented

Examples that demonstrate the usage of this library can be found in the Examples/ folder.